集成电路行业废物资源化研究进展与展望
汪跃文, 邱若楠, 张恩光, 张悦, 刘强
Research progress and prospect of waste resource recycling in integrated circuit industry
WANG Yuewen, QIU Ruonan, ZHANG Enguang, ZHANG Yue, LIU Qiang
自然杂志
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2026, (4): 279
-289
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DOI: 10.3969/j.issn.0253-9608.2026.04.004